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Sematech CEO Armbrust warns industry and government leaders (Business Review)
ITRS CHAPTER: Lithography (Future Fab)
Fast-Forward 2020: Envisioning the Next Decade in Technology R&D (Future Fab)
Semiconductor metrology beyond 22nm: FinFET metrology (Solid State Technology)
Wanted: 3-D IC standards within six months (EE Times)
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