00013877A-ENG Abstract: Current State of Defect Review by Electron Beam Tools: A White Paper

SEMATECH DOC ID #: 00013877A-ENG

Title: Current State of Defect Review by Electron Beam Tools: A White Paper

Author(s): Alain Diebold;David Joy;

Document date: 01/14/2000

Descriptor(s): defect detection;electron beam columns;equipment performance;statistical modeling;

Abstract: This white paper examines the performance of electron beam (E-beam) tools for
defect review at the 0.14 um node and beyond, using a statistical model of
contrast formation to estimate error rates and detection limits, on the basis
of the electron-optical performance of the tool. It is found that while there
is no problem in detecting defects as small as 10 nm even when using current
instrumentation, the throughput rate is too slow to meet the required
specification for imminent technology generations. Possible strategies to
circumvent this limitation are discussed.

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