SEMATECH DOC ID #: 01044107A-ENG

Title: International SEMATECH Equipment Maturity Assessment (EMA) Handbook

Author(s): Lorn Christal;Steve Fulton;

Document date: 04/12/2001

Descriptor(s): equipment performance;procedures;standards;

Abstract:  This document from the Guidelines and Standards project (304-501) is a
reference to assist those performing Equipment Maturity Assessments (EMAs) as
described in the International SEMATECH (ISMT) Demonstration Test Methods
(DTM) document. This handbook addresses all 27 equipment characteristics
listed in the DTM document by providing suggested topics of investigation, as
well as areas requiring evidentiary materials that should be reviewed during
the EMA. The handbook covers preparatory activities, procedures, reporting
requirements, and characteristics worksheets.

To Document

© Copyright 2012 SEMATECH, Inc.
Please read these important Trademark and legal notices