SEMATECH DOC ID #: 01044112A-ENG

Title: Prober Interface Communications Guideline

Author(s): A. Kwan;D. Hartman;D. Howard;R. Nageswaran;R. Odhner;S. Stringer;

Document date: 04/26/2001

Descriptor(s): standards;specifications;test equipment;probes;testing;automation;equipment performance;

Abstract:  This document from MFGM006 contains specifications for the communications
interface of prober equipment used for wafer test. It should be used as a
supplement to the corresponding standard, SEMI E91, when member companies
procure wafer prober equipment. Test scenarios are also included; the
scenarios can be used to determine compliance with both SEMI E91 and the
additional specification in this document.

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