SEMATECH DOC ID #: 03024374A-ENG

Title: Early Equipment Evaluation (E3) Methodology

Author(s): Lorn Christal;

Document date: 02/28/2003

Descriptor(s): equipment testing;procedures;equipment performance;

Abstract:  This report from the MFGM009 program provides process,
automation, and development engineers and their managers a basic
understanding of the requirements of the International SEMATECH
(ISMT) Early Equipment Evaluation (E^3) process. The E^3 process
emphasizes fact-based decision-making with statistically valid
data at any stage of 300 mm semiconductor equipment development.
Its primary intent is to initiate improvement activities when the
results of equipment performance do not meet end user
expectations and/or metrics.

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