SEMATECH DOC ID #: 03034388A-ENG

Title: Automatic Data Collection (ADC) Requirements for Tracking Tool Performance

Author(s): Gino Crispieri;Harvey Wohlwend;Mary Marsden;SEMI EPT Task Force;

Document date: 04/16/2003

Descriptor(s): 300 mm wafers;automated data collection;standards;e-manufacturing;equipment performance;equipment testing;data management standards;

Abstract:  This document from Project MFGM005 consists of guidelines for
equipment suppliers to provide baseline requirements for
automatic data collection (ADC) of tool productivity and
performance metrics. It is primarily targeted at the 300 mm
toolset. It defines the minimum data required to track the
performance of process equipment in a semiconductor manufacturing
factory, defines the compliance testing goals and methodologies,
and provides guidelines for software documentation and compliance
testing reports. This report is a follow-on to Technology
Transfer #00094004A-ENG.

The following materials are reprinted with permission from SEMI
E98-0600 (C) SEMI 2000 Semiconductor Equipment and Materials
International. All rights reserved.

Section 3.1, pages 4-6

Section 4.1, page 7

Figure 1, page 8

SEMI standards are subject to revision at any time. For
information on the current edition of these standards, please
visit the SEMI website at www.semi.org.

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