90120403B-STD Abstract: SEMASPEC Test Method for XPS Analysis of Surface Composition and Chemistry of Electropolished Stainless Steel Tubing for Gas Distribution System Compo

SEMATECH DOC ID #: 90120403B-STD

Title: SEMASPEC Test Method for XPS Analysis of Surface Composition and Chemistry of Electropolished Stainless Steel Tubing for Gas Distribution System Compo

Author(s): Unknown;

Document date: 04/01/1993

Descriptor(s): surface composition;electron spectroscopy for chemical analysis;stainless steel tubing;defect sources;facilities;gas distribution systems;specifications;components;component testing;gas purity;test methods;standards;

Abstract: This SEMASPEC defines a method of testing the interior surface of chromium
enhanced stainless steel tubing, fittings, and valves to determine the surface
composition and chemistry as a measure of the effectiveness of
electropolishing. Its purpose is to evaluate components considered for use in
ultra-high purity gas distribution systems. Application of this test method
is expected to yield comparable data among components tested for the purposes
of qualification for installation. This document is in development as an
industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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