SEMATECH DOC ID #: 05074664C-ENG

Title: International SEMATECH Manufacturing Initiative (ISMI) Equipment Data Acquisition (EDA) Evaluation Method: Version 4.0

Author(s): Gino Crispieri;Lance Rist;

Document date: 11/20/2009

Descriptor(s): automated data collection;computer software;data management standards;equipment characterization;standard conformance;

Abstract:  These guidelines from the MFGM065M project outline a method to
evaluate supplier implementations of the Equipment Data
Acquisition (EDA) standards and to accelerate their commercial
availability to end users. The EDA Evaluation Method is useful
for evaluating new or existing equipment, conversions, or a
complete fab retool. It applies to any type of equipment from the
alpha stage through early production cycles of equipment
development. This revision refines the evaluation method and adds
a detailed procedure for evaluating the equipment metadata.

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