05104693A-ENG Abstract: Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report

SEMATECH DOC ID #: 05104693A-ENG

Title: Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report

Author(s): Laurie S. Beau;

Document date: 12/01/2005

Descriptor(s): emissions reduction;perfluorocompounds;pollution control equipment;global climate change;chamber cleaning;process optimization;

Abstract: This report from the ESHI002M project reviews the current state
perfluorocompound (PFC) technology development and implementation
and describes the semiconductor industry's efforts to reduce PFC
emissions. It documents pre-competitive information about
potential PFC emission reduction processes and technology
obtained from a survey of members of the International SEMATECH
Manufacturing Initiative (ISMI); the Semiconductor Industry
Association (SIA); the World Semiconductor Council (WSC); and
chemical, tool, and abatement device suppliers. The appendix
includes details about process optimizations, alternative
processes, and abatement technologies.

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