91060574B-STD Abstract: SEMASPEC Test Method for Metallurgical Analysis for Gas Distribution System Components

SEMATECH DOC ID #: 91060574B-STD

Title: SEMASPEC Test Method for Metallurgical Analysis for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): defect sources;facilities;gas distribution systems;specifications;components;component testing;gas purity;test methods;

Abstract: This SEMASPEC defines a method for determining the elemental composition and
metallurgical characteristics of metal used to fabricate components for high
purity gas distribution systems in the semiconductor industry. The
composition and metallurgy of stainless steel may be expected to affect
properties of importance to this application including surface roughness,
incidence of surface defects, passivation, corrosion resistance, and welding.
This procedure is to evaluate components considered for use in ultra-high
purity gas distribution systems. Application of this test method is expected
to yield comparable data among components tested for the purposes of
qualification for installation. This document is in development as an
industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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