SEMATECH DOC ID #: 06034748C-ENG

Title: Equipment Data Acquisition (EDA) Guidance

Author(s): Gino Crispieri;Lance Rist;

Document date: 05/07/2009

Descriptor(s): data management standards;e-diagnostics;e-manufacturing;equipment data acquisition;factory automation;

Abstract:  This document from the MFGM065M project provides technical
guidance for semiconductor equipment suppliers, device makers,
and implementers of the standardized Equipment Data Acquisition
(EDA) interface to create consistent implementations. The primary
focus is definition of the metadata. This revision expands that
scope to include selected guidance in other EDA areas to help
provide more complete guidance. This EDA guidance is based on the
1105 release ("freeze 1") and leverages extensive lessons learned
from implementing and deploying the interface.

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