SEMATECH DOC ID #: 06034748D-ENG

Title: Equipment Data Acquisition (EDA) Version 1105 Guidance

Author(s): Gino Crispieri;Lance Rist;

Document date: 08/30/2010

Descriptor(s): data management standards;e-diagnostics;e-manufacturing;equipment data acquisition;factory automation;

Abstract:  This document from the MFGM065M project provides technical
guidance for semiconductor equipment suppliers, device makers,
and implementers of the standardized Equipment Data Acquisition
(EDA) interface to create consistent implementations. The primary
focus is to define the metadata. This revision includes other EDA
areas to provide more complete guidance. It is based on the 1105
EDA release (freeze 1) and leverages extensive lessons learned
from implementing and deploying the interface.

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