06114813A-ENG Abstract: Cross-Calibration of Absolute Spectral Measurements and PhysTex Energy Monitor for the In-Band and Out-of-Band Region on a Tin (Sn) LPP Source

SEMATECH DOC ID #: 06114813A-ENG

Title: Cross-Calibration of Absolute Spectral Measurements and PhysTex Energy Monitor for the In-Band and Out-of-Band Region on a Tin (Sn) LPP Source

Author(s): Emma Sokell;Fergal O'Reilly;Gerry O'Sullivan;Nicola Murphy;Oran Morris;Padraig Dunne;Patrick Hayden;Vivek Bakshi;

Document date: 11/28/2006

Descriptor(s): extreme ultraviolet lithography;plasma sources;tin;calibration;laser produced plasmas;

Abstract: This report from the LITH150 project presents the results of
cross-calibrating in-band and out-of-band (OOB) measurements
using an absolutely calibrated spectrometer in the extreme
ultraviolet (EUV) range and calibrated sources in the UV-infrared
(IR) ranges against a multilayer (ML)/filter-based energy
monitor. Two sets of instruments were cross-calibrated on a Tin
(Sn)-based laser plasma source. The output of a calibrated
Jenoptic EUV spectrometer and a multilayer
mirror/filter/photodiode combination was compared. The
performance of a filter-based photodiode energy monitor was
compared to that of a combination of National Institute of
Standards and Technology (NIST) standard radiation sources and a
0.75 m spectrometer.

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