SEMATECH DOC ID #: 08094959A-TR

Title: Recipe and Parameter Management (RaP) Evaluation Method

Author(s): Konrad Rosenbaum;Lance Rist;Thomas Marsh;

Document date: 09/25/2008

Descriptor(s): automated data collection;equipment performance;factory automation;recipe management;standards conformance;

Abstract:  This document from the MFGM054M project provides a basic
evaluation method for systems using Recipe and Parameter
Management (RaP) capabilities as defined in SEMI E139. The
evaluation method focuses on normal operations only. This
evaluation method can be performed with the International
SEMATECH Manufacturing Initiative (ISMI) RaP Reference
Implementation (RRI) software package.

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