SEMATECH DOC ID #: 09055011A-TR

Title: Equipment Data Acquisition (EDA) Change Summary: November 2005 to July 2009

Author(s): Lance Rist;

Document date: 06/26/2009

Descriptor(s): data management standards;e-diagnostics;e-manufacturing;equipment data acquisition;factory automation;

Abstract:  As a result of a "freeze" declared by International SEMATECH
Manufacturing Initiative (ISMI) members, all commercial
implementations of the Equipment Data Acquisition (EDA) interface
(also called "Interface A") have been based on the 1105 version
of the related SEMI standards. Meanwhile, work on the EDA
standards has continued. A new EDA freeze will include the
improvements to the SEMI standards since the 1105 release. This
document from the MFGM065M project lists and explains those
changes from the 1105 to the 0709 release to help users and
implementers of EDA understand the differences, learn of the
benefits, and gauge the amount of work needed to update existing
implementations.

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