SEMATECH DOC ID #: 92010942B-STD

Title: SEMATECH Provisional Test Method for Determining the Flow Coefficient of Filter Cartridges Used in Ultrapure Water (UPW) Distribution Systems

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;flow rates;filters;pressure measurement;

Abstract:  This test method can be used to verify that a filter cartridge will produce
the rated forward flow at the specified applied pressure or the rated pressure
loss at a specified flow rate. It applies to filter cartridges used in UPW
distribution systems. This document is in development as an industry standard
by Semiconductor Equipment and Materials International (SEMI). When
available, adherence to the SEMI standard is recommended.

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