SEMATECH DOC ID #: 10065100A-ENG

Title: 450 mm Factory Integration Maturity Assessment (FIMA)

Author(s): Eddy Bass;

Document date: 06/17/2010

Descriptor(s): 450 mm wafers;equipment performance;standards;test methods;

Abstract:  This document from the MFGM059M project presents the 450 mm compliance tests
or assessment methods to ensure 450 mm production. Three elements of factory
integration--equipment capabilities, physical interfaces, data and factory
systems (CIM) are covered. Best Known Practices (BKPs) and checklists directly address the needs for successful 450 mm factory integration. Data sheets are provided for evaluators who need standalone data collection sheets and procedures.

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