92061182B-GEN Abstract: SEMATECH Qualification Plan Guidelines for Engineering

SEMATECH DOC ID #: 92061182B-GEN

Title: SEMATECH Qualification Plan Guidelines for Engineering

Author(s): Karen Horrell;Pat Spagon;Terry Rogelstad;Wayne Clark;

Document date: 07/13/1995

Descriptor(s): passive data collection;design of experiments;marathon runs;process integration;gauge capability;process optimization;IRONMAN testing;equipment reliability;

Abstract: This document is the latest revision of the SEMATECH Qualification Plan
Guidelines for Engineering. The guidelines are designed to characterize
process performance and equipment and improve reliability. It provides a
method for experimentation and improvement. The plan is used to understand,
quantify, and improve the functionality of a tool or process while reducing
variability. It provides process engineers, hardware development engineers,
and their managers a basic understanding of the various elements in a
development methodology that emphasizes quality, completeness, and
decision-making with statistically valid data. This revision differs from
the previous version as follows: 1) A reliability improvement methodology
based on Motorola's IRONMAN procedure has been added. 2) The guidelines are
no longer classified SEMATECH Confidential because references to particular
suppliers or pieces of equipment have been deleted while still retaining
useful illustrative examples. 3) An appendix has been added that outlines the
additional steps a member company might add to the SEMATECH Qualification Plan
to achieve a full "Production Use Readiness Qualification." The steps are
useful because the plan focuses primarily on product or process
characterization and/or improvement issues, and not on factory installation
and maintenance issues.

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