SEMATECH DOC ID #: 94102578A-TR

Title: Metrology Roadmap: A Supplement to the National Technology Roadmap for Semiconductors

Author(s): Alain Diebold;

Document date: 02/09/1995

Descriptor(s): metrology;technology development;technology trends;manufacturing;

Abstract:  The Metrology Roadmap is a supplement to the National Technology Roadmap for
Semiconductors. The off-line, in-line, and in-situ analysis requirements for
development and manufacture of silicon integrated circuits are presented in a
form that facilitates direct reference to the roadmap. The Metrology Roadmap
is divided into the following sections: Introduction; Sensors and Methodology
for In-Situ Process Control; Process Integration, Devices & Structures;
Materials and Bulk Processes; Lithography; Interconnect; Factory Integration;
and Measurement Capability. Representatives from SEMATECH member companies
(Analytical Laboratory Manager Working Group), National Institute of Standards
and Technology (NIST), National Laboratories such as Sandia, and suppliers
involved in development and routine use of off-line, in-line, and in-situ
metrology tools developed this roadmap using the process and materials
requirements taken from the roadmap.

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