SEMATECH DOC ID #: 95012695A-ENG

Title: Global Warming Studies: Sampling/Test Plan Template (S69)

Author(s): Eugene Youngerman;Hugh Williamson;Ruth Carlson;Thomas Nelson;

Document date: 02/23/1995

Descriptor(s): global climate change;perfluorocompounds;pollution control equipment;chamber cleaning;dry etching;chemical vapor deposition;employee safety;

Abstract:  This document presents a generic sampling/test plan template and guidance for
comprehensive evaluations of abatement devices used to reduce the emissions of
perfluorocompounds (PFCs) in dry etch and chemical vapor deposition (CVD)
chamber cleaning. The template is designed to ensure that the data from
different evaluations are comparable, statistically meaningful, and
reproducible. The document provides guidance for determining destruction
removal efficiency (DRE), identification of byproducts, health and safety
issues, process characterization, equipment reliability, and cost of ownership
(COO).

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