SEMATECH DOC ID #: 95032745A-GEN

Title: Semiconductor Manufacturing Productivity Overall Equipment Effectiveness (OEE) Guidebook Revision 1.0

Author(s): Jerry Gililland;John Konopka;Kevin Barber;Rich Schnabl;V. A. Ames;

Document date: 04/20/1995

Descriptor(s): overall equipment effectiveness;productivity analysis;cost of ownership;throughput;equipment states;yield;computer software;

Abstract:  This document defines SEMATECH's approach to Overall Equipment Effectiveness
(OEE) methodology. OEE incorporates metrics from all semiconductor equipment
manufacturing states into a measurement system that can help manufacturing and
operations teams improve equipment performance and, therefore, reduce
equipment cost of ownership (COO). This guidebook describes how to begin
deploying OEE methodology. It is designed to help SEMATECH member companies
and their equipment suppliers implement a manufacturing productivity
improvement process. A SEMI E10 guidelines summary, instructions for using the
OEE diskette, a description of the SEMATECH Capacity Utilization Bottleneck
Efficiency System (CUBES), a glossary, and a list of related references are
appended. The accompanying files in Microsoft Excel (v4.0 or
later) help calculate OEE values.

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