95042789A-ENG Abstract: Project S116 Water Conservation 1994 Final Report

SEMATECH DOC ID #: 95042789A-ENG

Title: Project S116 Water Conservation 1994 Final Report

Author(s): Eric Koehler;Nipa Patel;Tracy Boswell;

Document date: 05/04/1995

Descriptor(s): ultrapure water;cost modeling;facilities;process optimization;cost of ownership;waste management;source reduction;

Abstract: This report provides and interprets the results of the assessment phase of the
S116 water conservation project. It consists of the development, execution,
and evaluation of a U.S.-based member company survey on water conservation and
the development of an ultrapure water (UPW) cost model. The evaluation of
survey data is limited to the interpretation of the survey responses; no
attempt was made to perform a statistical analysis because of the limited
sample. The status, issues, and opportunities in reclamation, recycle, and
source reduction are discussed and recommendations are made. The data is
presented in frequency and Pareto charts for benchmarking purposes. The
format, assumptions, and report capabilities of the UPW cost model are
discussed.

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