SEMATECH DOC ID #: 95052814A-ENG

Title: Project S66 Benchscale Testing of Gas Absorption in Wet Scrubbers

Author(s): Avtar S. Jassal;Glenn DeWolf;

Document date: 06/01/1995

Descriptor(s): absorption;corrosive emissions;chemical compounds;hydrogen compounds;halogen compounds;Fourier transform infrared spectroscopy;wet scrubbers;

Abstract:  This interim report presents detailed information on the experimental system
and results of the benchscale experiments on packed-bed wet scrubbers. The
benchscale testing was performed to examine fundamental absorption behavior
of selected individual chemical compounds and gas mixtures typical of
semiconductor fabs. All gases were measured by Fourier transform infrared
spectroscopy (FTIR), except fluorine and chlorine. These were measured by the
standard Environmental Protection Agency (EPA) wet chemical method for
halogen gases. Mass transfer behavior at low concentrations and in mixtures
in an air stream were examined. The report discusses project objectives and
technical approach; the experimental system and procedures; results; summary
and conclusions; and recommendations. The appendices provide additional
technical information.

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