SEMATECH DOC ID #: 95062847A-ENG

Title: Analysis of Data for Perfluorocompound (PFC) Emission Control Systems (S69)

Author(s): Richard F. Cambio;Thomas A. Tamayo;Walter Worth;

Document date: 07/06/1995

Descriptor(s): perfluorocompounds;global climate change;pollution control equipment;emissions control;cost of ownership;

Abstract:  This report describes the results of SEMATECH global warming project S69(b), a
study of the currently available and planned methods of abating emissions of
selected perfluorocompounds (PFCs): C2F6, CF4, NF3, and SF6. The study
reviewed all existing PFC emission control equipment test data for destruction
removal efficiency (DRE) and cost of ownership (COO). The results indicate
that most abatement devices are in the development stage and have not been
fully evaluated and proven to be effective and reliable in a manufacturing
environment. In the case of combustion, the need for fuel and the potential
generation of regulated byproducts such as hydrogen fluoride and nitrogen
oxides are a concern.

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