SEMATECH DOC ID #: 95082935A-ENG

Title: Destruction of Volatile Organic Compound (VOC) Emissions by Photocatalytic Oxidation (PCO): Benchscale Test Results and Cost Analysis (S66)

Author(s): Avtar Jassal;Craig S. Turchi;Roberto Rabago;

Document date: 08/31/1995

Descriptor(s): photocatalytic oxidation;volatile organic compounds;pollution control equipment;process optimization;cleaning equipment;cost analysis;

Abstract:  This report documents the benchscale results for the photocatalytic oxidation
(PCO) of the organic air emissions from a simulated parts cleaning sink. The
simulated effluent stream contained equal parts isopropanol, acetone, and
methanol, at a total concentration of 400 parts per million by volume (ppmv).
Under the conditions examined, >95% destruction of the incoming pollutants to
carbon dioxide and water was achieved. Optimization work obtained a ten-fold
rate increase in destruction efficiency compared to the base case operating
conditions through proper catalyst formulation, oxidant, and temperature.
Aside from the acetone formed and subsequently destroyed during the
destruction of isopropanol, no intermediate species were detected. In
addition, the optimum catalyst produced no detectable carbon monoxide.
Full-scale cost estimates based on optimized reaction conditions indicate that
a 400 scfm PCO unit would cost $60,000. Hexamethyldisilazane is not treatable
by photocatalytic oxidation because the catalyst rapidly deactivates.

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