SEMATECH DOC ID #: 96013067A-ENG

Title: Ignition Characteristics of Releases of 100% Silane (ESHB001)

Author(s): Francesco Tamanini;Jeffrey L. Chaffee;

Document date: 03/14/1996

Descriptor(s): safety;bulk gases;emissions control;

Abstract:  This project studied the effect of ventilation on the ignition
characteristics of releases of pure silane through commercially available
restricted flow orifices (RFOs). Two scenarios of accidental silane releases
in a ventilated cabinet were simulated: the first involved a leak from a
regulated pressure line to a process tool; the second simulated a leak from a
pigtail at a nearly full cylinder. For the high pressure release,
demonstration tests were performed in a gas cabinet. Additional experiments
were aimed at defining the effect of the line exit condition on ignition.
Test results indicated that the prompt ignition characteristics depend on the
initial pressure of the silane and on the conditions of the exit portion of
the line rather than on ventilation velocity, as previously believed.

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