SEMATECH DOC ID #: 96023084A-ENG

Title: Destruction of Volatile Organic Compound (VOC) Emissions by Photocatalytic Oxidation (PCO): Field Test Results (S66)

Author(s): Avtar S. Jassal;Craig S. Turchi;Roberto Rabago;

Document date: 02/29/1996

Descriptor(s): cleaning equipment;lithography equipment;photocatalytic oxidation;point of use abatement;pollution control equipment;volatile organic compounds;

Abstract:  This report discusses the results of a five-week field trial at a
semiconductor manufacturing facility to evaluate photocatalytic oxidation
(PCO) as a cost-effective technology for abating volatile organic compound
(VOC) emissions from cleaning sinks and phototracks. Data reveal that the PCO
process can treat emissions from either a parts cleaning sink or a
photolithography track (without hexamethyldisilazane [HMDS]). Over the test
period, the PCO system converted an average of 96% of all acetone emissions
from a cleaning sink. Overall conversion of the emissions from a planar
coating track (primarily ethyl lactate) was lower, averaging 75% to 80%. With
the notable exception of HMDS, none of the compounds reduced catalyst
activity. The data indicate that PCO systems can achieve high destruction
efficiencies under field conditions; however, more work is necessary to
optimize the design of PCO systems so that they operate effectively with
current industry processes.

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