SEMATECH DOC ID #: 96103186A-TR

Title: Guidelines for Manufacturing Equipment Reference Manuals

Author(s): Darin Shifley;Julian Serda;Victoria J. Pruett;

Document date: 10/31/1996

Descriptor(s): manufacturing technicians;quality management;

Abstract:  This document provides suggested standard contents for equipment reference
manuals for semiconductor process equipment. It includes a generic and
detailed outline for equipment manuals, with major sections on installing,
operating, controlling, and integrating process equipment. The contents of
this document were published previously as Section I of Guidelines for
Semiconductor Manufacturing Equipment Reference Manuals, Technician Training
Programs, and Training Evaluation, Technology Transfer #93031567A-XFR.
However, those contents are being republished here for user convenience.

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