SEMATECH DOC ID #: 96123222B-ENG

Title: Control Systems Requirements Specification (CSRS) 2.0

Author(s): James Moyne;

Document date: 02/19/1998

Descriptor(s): advanced process control;CIM;control systems;standards;

Abstract:  This document updates a Control Systems Requirements Specification (CSRS)
developed by SEMATECH's Control Systems Standardization Working Group (CSSWG)
in cooperation with SEMI's Equipment Control Systems Task Force (ECS-TF). The
main purpose of the document is to provide a requirements specification that
will specify in a common and reusable way the addition, deletion, or
modification of sensors, algorithms, applications, and control capabilities
in semiconductor processing systems at the user skill level. In achieving
this objective, the document maps requirements specifications to a set of
existing, pending, and future SEMI standards to provide an umbrella-like
directory for a complete CSRS. Additionally, the document contains a
specification for adding control capabilities to current and near-term next-
generation systems that includes a migration path to the CSRS.

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