97033270B-ENG Abstract: Equipment Class Application Guideline

SEMATECH DOC ID #: 97033270B-ENG

Title: Equipment Class Application Guideline

Author(s): David Carswell;Lorn Christal;

Document date: 12/02/1998

Descriptor(s): test methods;equipment performance;process capability;metrology;wafer size conversion;300 mm wafers;

Abstract: This revised document is intended to be used when preparing demonstration
test plans for semiconductor equipment and processes. It provides detail and
direction for applying the I300I 180 nm Equipment Performance Metrics -
Revision 1 and I300I Demonstration Test Method - Revision 1. The Equipment
Class Application Guideline defines the I300I equipment classes and will help
determine the class in which equipment should be categorized and tested. The
guideline provides information about gauges, measurement equipment, process
performance, and additional data to be collected during testing. Adaptations
for technical differences and specific processes are provided.

To Document