97063300A-ENG Abstract: Advanced Process Control Framework Initiative (APCFI) 1.0

SEMATECH DOC ID #: 97063300A-ENG

Title: Advanced Process Control Framework Initiative (APCFI) 1.0

Author(s): Tony Mullins;

Document date: 06/27/1997

Descriptor(s): advanced process control;frameworks;object oriented systems;specifications;systems architecture;

Abstract: This document describes the second iteration of specifications for the
Advanced Process Control (APC) Framework, a software system designed to
enable application of advanced process control techniques within
semiconductor factories. This document updates and replaces the
specifications defined in National Institute of Standards Technology (NIST)
Advanced Process Control Framework Initiative (APCFI) System-Level Design
(Technology Transfer #96093182A-ENG), published in September 1996. Key
elements of the APC system include use of object-oriented (OO) design
techniques, distributed architecture for implementation, and integration with
third party control algorithm development tools and existing factory control
systems. An appendix provides detailed specifications for each component of
APC. This document supplements a companion SEMATECH publication, Advanced
Process Control Framework Initiative (APCFI) Proposal Summary and Plan,
Technology Transfer #96093181A-ENG.

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