98113588A-TR Abstract: Object-Based Equipment Model Proof of Concept

SEMATECH DOC ID #: 98113588A-TR

Title: Object-Based Equipment Model Proof of Concept

Author(s): Gordon Davis;

Document date: 11/19/1998

Descriptor(s): equipment modeling;object oriented systems;

Abstract: This report describes the results of a project to determine the feasibility
of implementing Object-Based Equipment Model (OBEM)-compliant software
components using distributed object technologies. OBEM provides software
models of common semiconductor equipment and thus is useful in factory and
equipment design. In general, the project team found it is feasible to adapt
OBEM to the Interface Definition Language (IDL) of Object Management Group
(OMG), Java, Common Object Request Broker Architecture (CORBA), and the
Distributed Component Object Model (DCOM) from Microsoft. Appendixes contain
source code developed by the team for OMG IDL and Java.

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