SEMATECH DOC ID #: 98113600A-ENG

Title: Evaluation of Praxair's Perfluorocompound (PFC) Capture/Recovery System

Author(s): Cynthia Hoover;Tina Gilliland;

Document date: 12/17/1998

Descriptor(s): perfluorocompounds;Fourier transform infrared spectroscopy;absorption;quadrupole mass spectrometers;emissions monitoring;

Abstract:  This report discusses the evaluation of Praxair's perfluorocompound (PFC)
capture and recovery unit. The unit was designed to extract PFCs from the
combined exhaust of 20 or more tool process chambers. The exhaust is
pretreated for corrosives, pyphorics, moisture, and particulates before
entering a cryogenic section where PFCs are captured from the nitrogen and
other inerts in the exhaust by absorption in liquid C3F8 and then separated
into the individual PFCs by batch distillation. The analytic tools included
quadrupole mass spectrometer (QMS); Fourier transform infrared (FTIR)
spectrometers; and CO2, H2O, SiH4, and HF exhaust gas monitors. Capture
efficiencies for C2F6, CHF3, CF4, and SF6 were determined, and the cost of
operating the unit was estimated.

To Document

© Copyright 2008 SEMATECH, Inc.
Please read these important Trademark and legal notices