SEMATECH DOC ID #: 99033693A-ENG

Title: Integrated Minienvironment Design Best Practices

Author(s): Carol Davis;Craig Ottesen;David Hope;Ed Sherwood;J. Whitmore;

Document date: 03/29/1999

Descriptor(s): integrated minienvironments;equipment design;300 mm wafers;suppliers;

Abstract:  This Integrated Minienvironment Design Best Practices document provides
critical information that process and metrology equipment makers should
consider during the design of minienvironments integrated into production
equipment. The information presented here is a consolidation of best-known
methods and practices drawn from a wide variety of minienvironment users in
the industry through a study group of the International 300 mm Initiative
(I300I).

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