99083800B-TR Abstract: Advanced Particle Sizing Technique for Development of High-Accuracy Scanner Calibration Standards

SEMATECH DOC ID #: 99083800B-TR

Title: Advanced Particle Sizing Technique for Development of High-Accuracy Scanner Calibration Standards

Author(s): John C. Stover;Vijay Sankaran;

Document date: 10/08/1999

Descriptor(s): angle resolved scattering;particle detection;polystyrene;

Abstract: This report describes a new technique developed by The Scatter Works, Inc.
(TSW) to accurately size particles by their light scattering characteristics.
Current particle sizing methods have a high degree of uncertainty associated
with their stated size, which impacts the calibration of defect scanners in
operation at most fabs. The new technique measures the angle resolved light
scattering from polystyrene latex spheres (PSLSs) deposited on bare Si
wafers, and computes several parameters that provide an accurate measurement
of the true PSLS size when used in particular combinations. Three different
sets of particles certified by the National Institute of Standards and
Technology (NIST) were compared with the new technique; good agreement was
obtained with the NIST particles. TSW also established a parameter that is
easier to obtain experimentally and also has a low uncertainty.

This "B" revision of the document has been declassified, but otherwise is
identical to the prior version.

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