99113846A-ENG Abstract: Hazards Analysis Guide: A Reference Manual for Analyzing Safety Hazards on Semiconductor Manufacturing Equipment

SEMATECH DOC ID #: 99113846A-ENG

Title: Hazards Analysis Guide: A Reference Manual for Analyzing Safety Hazards on Semiconductor Manufacturing Equipment

Author(s): Andy McIntyre;Brett Davis;Brett Stringer;Eddie Liu;James Beasley;James Wright;Mike Sherman;Mollie Foster;Paul Kryska;

Document date: 11/30/1999

Descriptor(s): equipment safety;procedures;risk assessment;

Abstract: The document provides guidance to key techniques and methods used within the
semiconductor industry for identifying and documenting environment, safety,
and health (ESH) hazards and their controls. It contains a tutorial that
explains how to identify hazards, analyze hazards and controls, document the
results of an analysis, and manage residual risk. A hazards checklist and
examples of a hazard analysis are included.

Disclaimer:
This reference manual was prepared by the International SEMATECH equipment
ESH council ("the Council") as a guide for use by safety engineers and other
ESH professionals when conductiing a hazards analysis of semiconductor
manufacturing equipment. It contains ideas and suggestions provided by ESH
professionals within the semiconductor industry for the use of established
hazards analysis methodologies and associated protocols, including
governmental and SEMI guidelines and standards. It does not claim to be nor
is it intended to be a definitive reference guide or set of requirements for
the industry.

In developing this manual, the Council attempted to address many key elements
of an effective hazards analysis plan; however, specific regulations and code
compliance requirements may not have been addressed. In the event of a
conflict, compliance with legal and regulatory requirements must take
precedence over any suggestions offered by this manual. Hazards analysis
professionals and their companies retain responsibility for ensuring that
their ESH programs are sound and complete and that they meet regulatory
compliance requirements regardless of whether such requirements are addressed
herein.

This document is made available "as is" and "where is" without any warranty,
express or implied, made by the Council, International SEMATECH, or any
member company of International SEMATECH and said parties further
specifically disclaim liability for any losses or damages based on the
contents of this manual.

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