SEMATECH DOC ID #: 00023899A-TR

Title: Ozonated Water Removal of Photoresist: Literature Review

Author(s): Christopher Chidsey;SangWoo Lim;

Document date: 02/25/2000

Descriptor(s): ozone;photoresists;wet cleaning;

Abstract:  This report is a literature review of papers on ozonated water pre-diffusion
cleaning, its application to photoresist removal, ozone decomposition,
chemistry of ozone with organic species, and simulation of ozone
decomposition.

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