00063966A-TR Abstract: Scheduler/Dispatcher User Requirements

SEMATECH DOC ID #: 00063966A-TR

Title: Scheduler/Dispatcher User Requirements

Author(s): Bob Hodges;Gary Godding;Giichi Inoue;Karl Gartland;Michio Honma;Nihal Muzumbar;Satoshi Kono;Shinichi Hohkibara;

Document date: 06/29/2000

Descriptor(s): specifications;planning;scheduling;

Abstract: The challenge of processing 300 mm semiconductor wafers involves increased
levels of automation for many factory systems. In order to coordinate those
activities, an intelligent capability for scheduling and dispatching
activities involving many resources must be provided. 300 mm factory
scheduler/dispatcher software software must support coordinated scheduling
and dispatching of factory activities that involve both the processing and
transport of materials. It must also coordinate planned and unplanned
maintenance of equipment and durable resources. Scheduling constraints
imposed by mixed lot carriers and wafer-level processing for 300 mm wafers
must also be comprehended. This document defines the user requirements for
the functionality of a scheduling and dispatching capability with focus areas
on production optimization, material transport optimization, equipment
optimization, and associated reporting and simulation of factory activities.

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