SEMATECH DOC ID #: 00094004A-ENG

Title: Automatic Data Collection Baseline Requirements: Levels1 and 2 Events and Variables

Author(s): Clete Deller;Mary Marsden;

Document date: 10/25/2000

Descriptor(s): automation;data management standards;equipment performance;manufacturing management;process improvement;test methods;testing;

Abstract:  This document from Project MODA007 consists of guidelines for equipment
suppliers to promote an initial automatic data collection (ADC) baseline. It
is targeted at 150 mm and 200 mm toolsets. It defines the minimum data
required for performance tracking in a semiconductor manufacturing factory,
defines the compliance testing goals and methodologies, and provides
guidelines for software documentation and compliance testing reporting.

The following materials are reprinted with permission from SEMI E98-0600 (c)
SEMI 2000 Semiconductor Equipment and Materials International. All rights
reserved.
Section 3.2, pages 4-6
Section 4.1 page 7
Figure 1, page 8
SEMI standards are subject to revision at any time. For information on the
current edition of these standards, please visit the SEMI website at
www.semi.org.

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