00124063B-ENG Abstract: 300 mm Best-Known Practices (300 BKP) for 300 mm Factory Integration

SEMATECH DOC ID #: 00124063B-ENG

Title: 300 mm Best-Known Practices (300 BKP) for 300 mm Factory Integration

Author(s): Lorn Christal;Steve Fulton;

Document date: 11/29/2001

Descriptor(s): 300 mm wafers;equipment performance;integration;standards;test methods;

Abstract: This document from 304-501 is the latest iteration of 300 mm
compliance tests or assessment methods to ensure 300 mm
production. This revision covers the first three elements of five
factory integration elements-Equipment Capabilities, Physical
Interfaces, Productivity Improvement, Data and Factory Systems
(CIM), and Regulatory Requirements. The best-known test methods
(BKP) and/or checklists directly address the needs for successful
300 mm factory integration. Data sheets are provided to support
readers who need standalone data collection sheets and
procedures.

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