SEMATECH DOC ID #: 01064135B-ENG

Title: Uniform Environment, Safety, and Health (ESH) Specification for Equipment Procurement (v.1.3)

Author(s): Carl Williams;Peter Dahlgren;

Document date: 01/29/2003

Descriptor(s): environmental standards;procedures;procurement specifications;safety standards;test equipment;

Abstract:  This document from the ESHF004 project is a non-confidential set
of common environment, safety, and health (ESH) guidelines that
device manufacturers may use in equipment purchasing
specifications. These ESH guidelines were designed for use in
purchasing semiconductor manufacturing tools and
metrology/assembly/test equipment, including related support
equipment such as cabinets, chillers, pumps, and other ancillary
equipment. This document was compiled based on input from the
member company participants of the International SEMATECH
Equipment ESH Working Group.

Disclaimer:
The objective of this publication is to develop guidelines that
each device maker may use as a starting point when considering
the environment, safety, and health requirements for equipment it
is purchasing from a particular supplier. The guidelines should
facilitate clearer understanding between each device maker and
its suppliers. Each device maker, of course, is free to propose
and negotiate whatever terms it wishes with any supplier.

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