SEMATECH DOC ID #: 01084153D-ENG

Title: e-Diagnostics Guidebook: Revision 2.1

Author(s): Harvey Wohlwend;

Document date: 07/12/2005

Descriptor(s): automation;e-diagnostics;e-manufacturing;overall equipment effectiveness;standards;equipment data acquisition;diagnostics data acquisition;

Abstract:  This document from the MFGM027M project provides guidelines and
requirements for implementing an e-Diagnostics system within a
semiconductor factory. The suggested capabilities are designed to
be broadly based on open standards, compatible with existing
structures, and subject to evolving technology. This revision
includes Interface C Use Cases, the secure movement of data
between the factory and the equipment support organization. The
security section is also updated.

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