SEMATECH DOC ID #: 02034260A-TR

Title: Fab Utility Cost Values for Cost of Ownership (COO) Calculations

Author(s): Michael O'Halloran;

Document date: 03/25/2002

Descriptor(s): 

Abstract:  This report provides a representative set of utility costs for
semiconductor device and tool manufacturers. The utility costs
can be used for calculating tool cost of ownership (COO) and for
estimating total energy cost savings. They are categorized as
variable (operating) costs, capital costs, indirect variable
costs, and indirect capital costs. This report is for general use
by manufacturing engineers and tool suppliers.

Fab Utility Cost Values for Cost of Ownership (COO) Calculations (Excel) To Document

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