02034261A-TR Abstract: Environment, Safety, and Health (ESH) Metrics for Semiconductor Manufacturing Equipment (SME)

SEMATECH DOC ID #: 02034261A-TR

Title: Environment, Safety, and Health (ESH) Metrics for Semiconductor Manufacturing Equipment (SME)

Author(s): Peter Dahlgren;

Document date: 04/01/2002

Descriptor(s): emissions monitoring;equipment safety;environmental standards;performance specifications;

Abstract: This report from the International SEMATECH (ISMT) ESHF004
project identifies a set of key environment, safety, and health
(ESH) performance parameters for semiconductor manufacturing
equipment (SME) identified by the project working group during
2001 and refined by the ESH Program Advisory Group (PAG) during
February 2002. These metrics were developed to provide a uniform
method for evaluating the ESH performance of SME. Future work
planned in this area is described, including populating a
database of equipment ESH metrics to permit the evaluation and
comparison of ESH performance for selected SME, assist in the
development of equipment ESH goals for the International
Technology Roadmap for Semiconductors (ITRS), and provide focus
for follow-on projects with SME suppliers to further improve
equipment ESH performance.

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