03024377A-TR Abstract: Critical Reliability Challenges for The International Technology Roadmap for Semiconductors (ITRS)

SEMATECH DOC ID #: 03024377A-TR

Title: Critical Reliability Challenges for The International Technology Roadmap for Semiconductors (ITRS)

Author(s): Andreas Preussger;Bob Likins;Carl Peridier;George Prokop;Joe McPherson;Jose Maiz;Larry Tullos;Martin Johnson;Nick Lycoudes;Richard Blish;Steve Huber;Ted Dellin;Yeng Peng;

Document date: 03/31/2003

Descriptor(s): reliability;planning;technology trends;

Abstract: This white paper highlights the critical near-term reliability
challenges facing the International Technology Roadmap for
Semiconductors (ITRS). It is intended to help ISMT groups working
on the 2003 edition of the ITRS understand why each of these
challenges is considered critical and, more importantly, what
questions researchers must answer to prevent these issues from
blocking manufacturable solutions.

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