03044393H-ENG Abstract: Semiconductor Equipment and Manufacturing Standards Activities Timeline and Roadmap, Rev. 09, December 2005

SEMATECH DOC ID #: 03044393H-ENG

Title: Semiconductor Equipment and Manufacturing Standards Activities Timeline and Roadmap, Rev. 09, December 2005

Author(s): Jackie Ferrell;Lance Rist;

Document date: 12/14/2005

Descriptor(s): standards;equipment performance;e-manufacturing;process control;safety;silicon substrates;wafer parameters;

Abstract: This document from the MFGM017M project tracks the history,
status, and plans for SEMI standards development activities since
2002. Sections have been included to cover SEMI Information and
Control, Physical Interfaces and Carriers, Metrics, ESH,
Traceability, Microlithography, and Silicon Wafers standards
activities. This report does not include all SEMI committee
activities. The content is derived from information publicly
available on the SEMI website. Further information about SEMI
standards activities is available on the SEMI website at
www.semi.org. This document is intended to be updated frequently
as plans and expectations change.

Semiconductor Equipment and Manufacturing Standards Activities Timeline and Roadmap, Rev. 09, December 2005