SEMATECH DOC ID #: 03084423A-TR

Title: Paragon Gas Injector Installation and Performance Report

Author(s): Robert Sherman;

Document date: 12/12/2003

Descriptor(s): boron compounds;nitrogen;yield;moisture;vacuum;pumps;equipment performance;gas pressure;

Abstract:  This document reports an evaluation of the Paragon gas injector
at International SEMATECH. The Paragon gas injector was installed
in 1994 to support a metal etch process. Details of the pilot
test installation and a history of its 9-year performance are
presented.

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