SEMATECH DOC ID #: 04024490A-TR

Title: Flying Circus 2 (FC2): Calibration of an Extreme Ultraviolet (EUV) Source at PLEX LLC

Author(s): Caspar Bruineman;Fred Bijkerk;Santi Alonso van der Westen;Vivek Bakshi;

Document date: 04/01/2004

Descriptor(s): extreme ultraviolet lithography;equipment performance;calibration;

Abstract:  This report from the LITH150 project describes the results of the
performance assessment of a PLEX LLC (Cambridge, MA) extreme
ultraviolet (EUV) source using the Flying Circus 2 (FC2)
diagnostic tool to measure radiation.

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