SEMATECH DOC ID #: 04024498A-TR

Title: Cross-Calibration of Extreme Ultraviolet (EUV) Energy Sensors

Author(s): Fred Bijkerk;Guido Hergenhan;Guido Schriever;Kai Gabel;Max Schuermann;Rene de Bruijn;Santi Alonso van der Westen;Thomas Missalla;Uwe Stamm;Vivek Bakshi;

Document date: 04/01/2004

Descriptor(s): extreme ultraviolet lithography;plasma;xenon;sensors;calibration;

Abstract:  This report from the LITH150 project describes the cross-
calibration of Flying Circus 2 (FC2) and the E-Mon extreme
ultraviolet (EUV) energy sensors. These sensors were cross-
calibrated on a gas discharge produced plasma (GDPP) EUV source
and a laser produced plasma (LPP) EUV source. Detailed
calibration procedures and the experimental details for cross-
calibrating the sensors are presented.

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