05074664B-TR Abstract: International SEMATECH Manufacturing Initiative (ISMI) Equipment Data Acquisition (EDA) Evaluation Method: Version 3.0

SEMATECH DOC ID #: 05074664B-TR

Title: International SEMATECH Manufacturing Initiative (ISMI) Equipment Data Acquisition (EDA) Evaluation Method: Version 3.0

Author(s): Charisse Rosier;Gino Crispieri;Lance Rist;Lorn Christal;Steve Fulton;

Document date: 03/27/2006

Descriptor(s): data management standards;equipment characterization;automated data collection;computer software;standards conformance;

Abstract: These guidelines from the MFGM026M project outline a method to
evaluate supplier implementations of the Equipment Data
Acquisition (EDA) standards and to accelerate their commercial
availability to end users. The EDA Evaluation Method is useful
for evaluating new or existing tools, conversions, or a complete
fab retool. It applies to any type of equipment from the alpha
through early production cycles of equipment development. This
revision refines the evaluation steps provided in appendix A and
refines the performance evaluation procedures. Guidance for how
to analyze the evaluation data was added in Appendix D. Guidance
was also added to appendix A for how to use the International
SEMATECH Manufacturing Initiative (ISMI) EDA Client Connection
Emulator (ECCE) to perform the evaluation steps.

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